Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Or split into 4x interest-free payments of 25% on orders over R50
Learn more
Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Imprint | Wiley-VCH Verlag GmbH |
Country of origin | Germany |
Series | Advanced Micro and Nanosystems |
Release date | April 2015 |
Availability | Supplier out of stock. If you add this item to your wish list we will let you know when it becomes available. |
First published | December 2014 |
Editors | Oliver Brand, Isabelle Dufour, Stephen Heinrich, Fabien Josse |
Series editors | Gary K. Fedder, Christofer Hierold, Jan G. Korvink, Osamu Tabata |
Dimensions | 251 x 176 x 30mm (L x W x T) |
Format | Hardcover |
Pages | 512 |
ISBN-13 | 978-3-527-33545-9 |
Barcode | 9783527335459 |
Categories | |
LSN | 3-527-33545-5 |