This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.
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This book provides a comprehensive monograph on gate stacks in semiconductor technology. It covers the major latest developments and basics and will be useful as a reference work for researchers, engineers and graduate students alike. The reader will get a clear view of what has been done so far, what is the state-of-the-art and which are the main challenges ahead before we come any closer to a viable Ge and III-V MOS technology.
Imprint | Springer-Verlag |
Country of origin | Germany |
Series | Springer Series in Advanced Microelectronics, 27 |
Release date | November 2010 |
Availability | Expected to ship within 10 - 15 working days |
First published | 2007 |
Editors | Athanasios Dimoulas, Evgeni Gusev, Paul C. McIntyre, Marc Heyns |
Dimensions | 235 x 155 x 21mm (L x W x T) |
Format | Paperback |
Pages | 384 |
Edition | Softcover reprint of hardcover 1st ed. 2007 |
ISBN-13 | 978-3-642-09071-4 |
Barcode | 9783642090714 |
Categories | |
LSN | 3-642-09071-0 |