In order to comprehend spectroscopic ellipsometry, however, a fundamental knowledge for optics is required. In the book, therefore, "Principles of Optics" and "Polarization of Light" are described (Chapters 2 and 3). From these two chapters, the principles of spectroscopic ellipsometry presented in Chapter 4 can be understood more easily. The author focuses on data analysis in the next few chapters: in particular, the principles and physical backgrounds of ellipsometry analysis are discussed in detail in Chapter 5. Since there is growing interest for optical anisotropy, the data analysis of anisotropic materials is explained in Chapters 6 and the subsequent chapter presents examples of ellipsometry analyses for various materials used in different fields are described. In the final chapter, the applications of spectroscopic ellipsometry for growth monitoring and feedback control of processing areaddressed.
This book will be appropriate as a text for students as well as researchers, in institutes and industrial laboratories, in providing practical information on the applications of spectroscopic ellipsometry.
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In order to comprehend spectroscopic ellipsometry, however, a fundamental knowledge for optics is required. In the book, therefore, "Principles of Optics" and "Polarization of Light" are described (Chapters 2 and 3). From these two chapters, the principles of spectroscopic ellipsometry presented in Chapter 4 can be understood more easily. The author focuses on data analysis in the next few chapters: in particular, the principles and physical backgrounds of ellipsometry analysis are discussed in detail in Chapter 5. Since there is growing interest for optical anisotropy, the data analysis of anisotropic materials is explained in Chapters 6 and the subsequent chapter presents examples of ellipsometry analyses for various materials used in different fields are described. In the final chapter, the applications of spectroscopic ellipsometry for growth monitoring and feedback control of processing areaddressed.
This book will be appropriate as a text for students as well as researchers, in institutes and industrial laboratories, in providing practical information on the applications of spectroscopic ellipsometry.
Imprint | John Wiley & Sons |
Country of origin | United States |
Release date | 2007 |
Availability | Expected to ship within 12 - 17 working days |
First published | March 2007 |
Authors | H. Fujiwara |
Dimensions | 229 x 152 x 22mm (L x W x T) |
Format | Hardcover |
Pages | 392 |
ISBN-13 | 978-0-470-01608-4 |
Barcode | 9780470016084 |
Categories | |
LSN | 0-470-01608-6 |