Wafer Fabrication - Automatic Material Handling System (Hardcover)
Jie ZhangThis book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
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Product Description
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
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Product Details
General
Imprint | De Gruyter |
Country of origin | Germany |
Release date | September 2018 |
Availability | Expected to ship within 12 - 17 working days |
First published | 2018 |
Authors | Jie Zhang |
Contributors | Huazhong University of Science and Technology |
Dimensions | 240 x 170 x 18mm (L x W x T) |
Format | Hardcover - Cloth over boards |
Pages | 284 |
ISBN-13 | 978-3-11-048690-2 |
Barcode | 9783110486902 |
Categories | |
LSN | 3-11-048690-3 |
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